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1

Components for high speed atomic force microscopy

Georg E. Fantner, Georg Schitter, Johannes H. Kindt, Tzvetan Ivanov, Katarina Ivanova, Rohan Patel, Niels Holten-Andersen, Jonathan Adams, Philipp J. Thurner, Ivo W. Rangelow, Paul K. Hansma

Journal:

Ultramicroscopy

Année:

2006

Langue:

english

Fichier:

PDF, 582 KB

english, 2006

2

Nanolithography by scanning probes on calixarene molecular glass resist using mix-and-match lithography

Kaestner, Marcus, Hofer, Manuel, Rangelow, Ivo W.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2013

Langue:

english

Fichier:

PDF, 8.75 MB

english, 2013

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Alternative Lithographic Technologies II - Nanoprobe maskless lithography

Rangelow, Ivo W., Ivanov, Tzvetan, Sarov, Yanko, Schuh, Andreas, Frank, Andreas, Hartmann, Hans, Zöllner, Jens-Peter, Olynick, Dierdre L., Kalchenko, V., Herr, Daniel J. C.

Année:

2010

Langue:

english

Fichier:

PDF, 3.50 MB

english, 2010

4

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology

Lenk, Claudia, Krivoshapkina, Yana, Hofmann, Martin, Lenk, Steve, Ivanov, Tzvetan, Rangelow, Ivo W., Ahmad, Ahmad, Reum, Alexander, Holz, Mathias, Glinsner, Thomas, Eibelhuber, Martin, Treiblmayr, Dom

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 5.69 MB

english, 2019

5

On the solution of the problem of seismic waves propagation in a multilayered nonelastic region by the BEM

P. Dineva, L. Hadjikov, Ts. Rangelow

Journal:

Soil Dynamics and Earthquake Engineering

Année:

1991

Langue:

english

Fichier:

PDF, 526 KB

english, 1991

6

A novel piezoresistive microprobe for atomic and lateral force microscopy

Teodor Gotszalk, P.B. Grabiec, I.W. Rangelow

Journal:

Sensors and Actuators A: Physical

Année:

2005

Langue:

english

Fichier:

PDF, 1.03 MB

english, 2005

7

Reactive ion etching for high aspect ratio silicon micromachining

Journal:

Surface and Coatings Technology

Année:

1997

Langue:

english

Fichier:

PDF, 1.39 MB

english, 1997

8

Etching processes for High Aspect Ratio Micro Systems Technology (HARMST)

R. Kassing, I. W. Rangelow

Journal:

Microsystem Technologies

Année:

1996

Langue:

english

Fichier:

PDF, 2.55 MB

english, 1996

9

Profile simulation model for sub-50 nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma

Ishchuk, Valentyn, Olynick, Deirdre L., Liu, Zuwei, Rangelow, Ivo W.

Journal:

Journal of Applied Physics

Année:

2015

Langue:

english

Fichier:

PDF, 3.00 MB

english, 2015

10

Field-emission scanning probe lithography tool for 150 mm wafer

Holz, Mathias, Guliyev, Elshad, Ahmad, Ahmad, Ivanov, Tzvetan, Reum, Alexander, Hofmann, Martin, Lenk, Claudia, Kaestner, Marcus, Reuter, Christoph, Lenk, Steve, Rangelow, Ivo W., Nikolov, Nikolay

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 7.39 MB

english, 2018

11

[IEEE 2019 IEEE International Conference on Mechatronics (ICM) - Ilmenau, Germany (2019.3.18-2019.3.20)] 2019 IEEE International Conference on Mechatronics (ICM) - Active Cantilevers with Diamond-Tip for Field Emission Scanning Probe Lithography and Imaging

Hofmann, Martin, Mechold, Stephan, Holz, Mathias, Ahmad, Ahmad, Ivanonv, Tzvetan, Rangelow, Ivo W.

Année:

2019

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2019

12

Characterization of a cantilever with an integrated deflection sensor

R. Linnemann, T. Gotszalk, L. Hadjiiski, I.W. Rangelow

Journal:

Thin Solid Films

Année:

1995

Langue:

english

Fichier:

PDF, 770 KB

english, 1995

13

Application of neural networks to a scanning probe microscopy system

L. Hadjiiski, R. Linnemann, M. Stopka, E. Oesterschulze, I. Rangelow, R. Kassing

Journal:

Thin Solid Films

Année:

1995

Langue:

english

Fichier:

PDF, 799 KB

english, 1995

14

SIMS and AES investigations of contamination effects by RIE of PIQ layers

I.W. Rangelow, K. Maβeli, L. Niewöhner, R. Kassing, W. Pilz

Journal:

Microelectronic Engineering

Année:

1985

Langue:

english

Fichier:

PDF, 586 KB

english, 1985

15

Computer simulation of pattern profiles through physical etching with shadow, trenching, and redeposition

I.W. Rangelow, P. Thoren, R. Kissing

Journal:

Microelectronic Engineering

Année:

1985

Langue:

english

Fichier:

PDF, 857 KB

english, 1985

16

Nano-resolution tri-level process by downstream- microwave rf-biased etching

Journal:

Microelectronic Engineering

Année:

1992

Langue:

english

Fichier:

PDF, 337 KB

english, 1992

17

MEMS fabrication by Lithography and Reactive Ion Etching (LIRIE)

I.W. Rangelow, P. Hudek

Journal:

Microelectronic Engineering

Année:

1995

Langue:

english

Fichier:

PDF, 1.33 MB

english, 1995

18

Strategies for integration of donor electron spin qubits in silicon

T. Schenkel, J.A. Liddle, J. Bokor, A. Persaud, S.J. Park, J. Shangkuan, C.C. Lo, S. Kwon, S.A. Lyon, A.M. Tyryshkin, I.W. Rangelow, Y. Sarov, D.H. Schneider, J. Ager, R. de Sousa

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 241 KB

english, 2006

19

Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique

A. Deutschinger, U. Schmid, M. Schneider, W. Brenner, H. Wanzenböck, B. Volland, Tzv. Ivanov, I. W. Rangelow

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 576 KB

english, 2010

20

Ion-beam etching, and chemically-assisted ion-beam etching to produce x-ray masks for synchrotron-radiation-lithography

Journal:

Microelectronic Engineering

Année:

1985

Langue:

english

Fichier:

PDF, 1.20 MB

english, 1985

21

Chromium nano-width ribbons by standard lithography and wet etching

Michal Zaborowski, Piotr Grabiec, Ivo W. Rangelow

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 453 KB

english, 2004

22

High aspect ratio silicon tips field emitter array

I.W. Rangelow, St. Biehl

Journal:

Microelectronic Engineering

Année:

2001

Langue:

english

Fichier:

PDF, 256 KB

english, 2001

23

SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis

P. Grabiec, T. Gotszalk, J. Radojewski, K. Edinger, N. Abedinov, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

2002

Langue:

english

Fichier:

PDF, 685 KB

english, 2002

24

Electrostatically driven microgripper

B.E. Volland, H. Heerlein, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

2002

Langue:

english

Fichier:

PDF, 961 KB

english, 2002

25

Ultrasharp diamond-coated silicon tips for scanning-probe devices

E.I. Givargizov, A.N. Stepanova, E.S. Mashkova, V.A. Molchanov, F Shi, P. Hudek, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

1998

Langue:

english

Fichier:

PDF, 344 KB

english, 1998

26

Fabrication of multipurpose AFM/SCM/SEP microprobe with integrated piezoresistive deflection sensor and isolated conductive tip

T. Gotszalk, P. Grabiec, F. Shi, P. Dumania, P. Hudek, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

1998

Langue:

english

Fichier:

PDF, 398 KB

english, 1998

27

Increased imaging speed and force sensitivity for bio-applications with small cantilevers using a conventional AFM setup

Michael Leitner, Georg E. Fantner, Ernest J. Fantner, Katerina Ivanova, Tzvetan Ivanov, Ivo Rangelow, Andreas Ebner, Martina Rangl, Jilin Tang, Peter Hinterdorfer

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2012

28

Single mask fabrication process for movable MEMS devices

Alamin Dow, Ali B., Gougam, Adel, Kherani, Nazir P., Rangelow, I. W.

Journal:

Microsystem Technologies

Année:

2014

Langue:

english

Fichier:

PDF, 447 KB

english, 2014

29

Microthermomechanical infrared sensors

Steffanson, M., Rangelow, I. W.

Journal:

Opto-Electronics Review

Année:

2014

Langue:

english

Fichier:

PDF, 2.30 MB

english, 2014

30

ViPER: simulation software for high aspect ratio plasma etching of silicon

Ishchuk, Valentyn, Volland, Burkhard E., Rangelow, Ivo W.

Journal:

Microsystem Technologies

Année:

2014

Langue:

english

Fichier:

PDF, 637 KB

english, 2014

31

[IEEE 27th European Microwave Conference, 1997 - Jerusalem, Israel (1997.10.4-1997.10.6)] 27th European Microwave Conference, 1997 - Air Bridge Based Planar Hybrid Technology for Microwave and Millimeterwave Applications

Wasige, E., Kompa, G., van Raay, F., Schmale, I., Rangelow, I.W., Scholz, W., Shi, F., Kassing, R., Meyer, R., Amann, M.-C., Hudek, P.

Année:

1997

Langue:

english

Fichier:

PDF, 289 KB

english, 1997

32

Profile evolution of Cr masked features undergoing HBr-inductively coupled plasma etching for use in 25 nm silicon nanoimprint templates

Olynick, Deirdre L., Liddle, J. Alexander, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2005

Langue:

english

Fichier:

PDF, 766 KB

english, 2005

33

SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 16 September 2014)] Scanning Microscopies 2014 - Shear force microscopy using piezoresistive cantilevers in surface metrology

Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Gotszalk, Teodor, Kopiec, Daniel, Sierakowski, Andrzej, Janus, Paweł, Grabiec, Piotr, Rangelow, Ivo W.

Année:

2014

Langue:

english

Fichier:

PDF, 729 KB

english, 2014

34

Multi-eigenmode control for high material contrast in bimodal and higher harmonic atomic force microscopy

Schuh, Andreas, Bozchalooi, Iman Soltani, Rangelow, Ivo W, Youcef-Toumi, Kamal

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 6.22 MB

english, 2015

35

Fabrication of self-actuated piezoresistive thermal probes

Hofer, Manuel, Ivanov, Tzvetan, Rudek, Maciej, Kopiec, Daniel, Guliyev, Elshad, Gotszalk, Teodor P., Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2015

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2015

36

Improved single ion implantation with scanning probe alignment

Ilg, Michael, Weis, Christoph D., Schwartz, Julian, Persaud, Arun, Ji, Qing, Chi Lo, Cheuk, Bokor, Jeffrey, Hegyi, Alex, Guliyev, Elshad, Rangelow, Ivo W., Schenkel, Thomas

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2012

Langue:

english

Fichier:

PDF, 1017 KB

english, 2012

37

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Ahmad, Ahmad, Ivanov, Tzvetan, Angelov, Tihomir, Rangelow, Ivo W.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 4.68 MB

english, 2015

38

Scanning proximal probe lithography for sub-10 nm resolution on calix[4]resorcinarene

M. Kaestner, I. W. Rangelow

Année:

2011

Langue:

english

Fichier:

PDF, 2.26 MB

english, 2011

39

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Alternative Lithographic Technologies IV - Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment

Kaestner, M., Rangelow, I. W., Tong, William M.

Année:

2012

Langue:

english

Fichier:

PDF, 1007 KB

english, 2012

40

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Fantner, Georg E., Burns, Daniel J., Belcher, Angela M., Rangelow, Ivo W., Youcef-Toumi, Kamal

Journal:

Journal of Dynamic Systems Measurement and Control

Année:

2009

Langue:

english

Fichier:

PDF, 908 KB

english, 2009

41

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Roeser, Dennis, Gutschmidt, Stefanie, Sattel, Thomas, Rangelow, Ivo W.

Journal:

Journal of Microelectromechanical Systems

Année:

2016

Langue:

english

Fichier:

PDF, 3.20 MB

english, 2016

42

[IEEE 1997 IEEE MTT-S International Microwave Symposium Digest - Denver, CO, USA (8-13 June 1997)] 1997 IEEE MTT-S International Microwave Symposium Digest - Air bridge based planar hybrid technology for microwave and millimeterwave applications

Wasige, E., Kompa, G., van Raay, F., Rangelow, I.W., Scholz, W., Shi, F., Kassing, R., Meyer, R., Amann, M.-C.

Année:

1997

Langue:

english

Fichier:

PDF, 707 KB

english, 1997

43

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Mix & match electron beam & scanning probe lithography for high throughput sub-10 nm lithography

Kaestner, Marcus, Tong, William M., Resnick, Douglas J., Hofer, Manuel, Rangelow, Ivo W.

Année:

2013

Langue:

english

Fichier:

PDF, 1.82 MB

english, 2013

44

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Chemically amplified deep UV resists for micromachining

Hudek, Peter, Rangelow, Ivo W., Kostic, Ivan, Grabiec, Piotr B., Shi, Feng, Pang, Stella W., Chang, Shih-Chia

Année:

1996

Langue:

english

Fichier:

PDF, 2.04 MB

english, 1996

45

Low temperature dry etching of chromium towards control at sub-5 nm dimensions

Staaks, Daniel, Yang, XiaoMin, Lee, Kim Y, Dhuey, Scott D, Sassolini, Simone, Rangelow, Ivo W, Olynick, Deirdre L

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 1.26 MB

english, 2016

46

Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Angelov, Tihomir, Ahmad, Ahmad, Guliyev, Elshad, Reum, Alexander, Atanasov, Ivaylo, Ivanov, Tzvetan, Ishchuk, Valentyn, Kaestner, Marcus, Krivoshapkina, Yana, Lenk, Steve, Lenk, Claudia, Rangelow, Ivo

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2016

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2016

47

Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

Sierakowski, Andrzej, Kopiec, Daniel, Majstrzyk, Wojciech, Kunicki, Piotr, Janus, Paweł, Dobrowolski, Rafał, Grabiec, Piotr, Rangelow, Ivo W, Gotszalk, Teodor

Journal:

Measurement Science and Technology

Année:

2017

Langue:

english

Fichier:

PDF, 3.16 MB

english, 2017

48

Simulation of field emission from volcano-gated tips for scanning probe lithography

Lenk, Steve, Kaestner, Marcus, Lenk, Claudia, Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2017

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2017

49

Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Rangelow, Ivo W., Ivanov, Tzvetan, Ahmad, Ahmad, Kaestner, Marcus, Lenk, Claudia, Bozchalooi, Iman S., Xia, Fangzhou, Youcef-Toumi, Kamal, Holz, Mathias, Reum, Alexander

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2017

Langue:

english

Fichier:

PDF, 5.07 MB

english, 2017

50

Thermomechanically and electromagnetically actuated piezoresistive cantilevers for fast-scanning probe microscopy investigations

Majstrzyk, W., Ahmad, A., Ivanov, Tzv., Reum, A., Angelow, T., Holz, M., Gotszalk, T., Rangelow, I.W.

Journal:

Sensors and Actuators A: Physical

Année:

2018

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2018